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Four Probe Tester

The device applies the Vanderbilt measurement method to the linear four-probe. By the ways of two electrical measurements under computer control, it will make analysis of the collected data in the computer and can automatically eliminate the effect of sample geometry, boundary effect, probe inequality and mechanical travel on the measurement results.
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Product details

Model:LDT-TR2022T


The device applies the Vanderbilt measurement method to the linear four-probe. By the ways of two electrical measurements under computer control, it will make analysis of the collected data in the computer and can automatically eliminate the effect of sample geometry, boundary effect, probe inequality and mechanical travel on the measurement results.


● Semiconductor Materials Factory
● Semiconductor Device Factory
● R&D Institution

● Colleges and Universities



SPECIFICATIONS

Measurement Range

• Specific resistance:10^(-5 )-10^5Ω.cm(Expanding)

• Square resistance: 10^(-4)- 10^6Ω (Expanding)

• Conductivity: 10^(-5)-10^5s/cm

• Resistance: 10^(-5)- 10^5Ω

Wafer Thickness

• 3mm

Wafer Diameter

• 140*150mm / 200*200mm / 400*500mm (Depends)

Constant Flow Source

• 1uA, 10uA, 100uA, 1mA, 10mA, 100mA

Digital Multimeter

• Range: 000.00-199.99mV / Definition: 10uV / Input Impedance>1000MΩ / Precision: ±0.1%


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